54.224.197.251 EKL Staff | Contact |
EKLlogo

Else Kooi Laboratory
TUlogo
Contact General

Address
Feldmannweg 17
2628 CT Delft
The Netherlands
email: info@EKL.tudelft.nl
phone +31-15-278 6234
fax      +31 -15 -278 7369
Management Secretary: Bianca Knot
 
Opening Times
Front door open Monday to Thursday: 8:00-17:00
Friday 8:00-15:00
Access Clean Rooms: 7 days / 24 hrs
MEMSlab Monday to Friday: 8:00 - 18:00

Driving Directions (Pdf)

Facilities
IC Processing Lab/MEMS-Lab: Casper Juffermans
Solar Cell Lab: Miro Zeman
Electrical Characterisation Lab: Lucasz Pakula
Large Signal & Submm Wave Lab: Leo de Vreede
EKL Access: Bianca Knot
Technical Facilities: Jan Warmerdam
+31-15-278 6087
+31-15-278 2409
+31-15-278 7708
+31-15-278 6187
+31-15-278 6234
+31-15-278 7745


Services

Responsible
Cleaning
Diffusion Furnaces
Electrical Characterization
Electroplating
Epitaxy
IC Processing
Implantation
In-line measurements (SEM)
Lithography
LPCVD
Mask Fabrication
MEMS Processing
Metallisation (PVD)
Metallisation (Evaporation)
PECVD
Plasma Etching
Wafer bonding
Wet Si etching (KOH/TMAOH)
Wet Etching
Wire Bonding & Packaging
Milosavljevic
vd Bogaard
Pakula
Wien
vd Bogaard, Scholtes
Milosavljevic, Scholtes
Hartingsveldt, Scholtes, Milosavljevic
Laros, Wingerden
Wien, Wingerden,Scholtes ,Zeijl
vd Bogaard. Berendse, Steenweg
Wingerden
Laros, Pandraud
Hartingsveldt, Wingerden
Wien, Hartingsveldt
vd Bogaard, Laros
Laros
Pandraud, Milosavljevic
Laros, vd Bogaard
Milosavljevic, Verhoeven
Hartingsveldt, Steenweg