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Else Kooi Laboratory

Formerly known as Dimes Technology Centre

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Equipment

EKL Equipment


Total 171 records
Equipment Name Category Trainings Cluster Owner Main Trainer Location

-- Bonding & Packaging Bonding & Packaging

Binder Oven Bonding & Packaging Koos Hartingsveldt Koos Hartingsveldt MEMS-Travee3

Disco DAD321 Bonding & Packaging Koos Hartingsveldt Koos Hartingsveldt MEMS-Travee3

MEI Al bonder 17 mu Bonding & Packaging Koos Hartingsveldt Koos Hartingsveldt MEMS-Travee3

MEI Al onder 32 mu Bonding & Packaging Koos Hartingsveldt Koos Hartingsveldt MEMS-Travee3

MEI Au Bonder Bonding & Packaging Koos Hartingsveldt Koos Hartingsveldt MEMS-Travee3

MEI Pick&Place Bonding & Packaging Koos Hartingsveldt Koos Hartingsveldt MEMS-Travee3

TPT Al/Au bonder Bonding & Packaging Koos Hartingsveldt Koos Hartingsveldt MEMS-Travee3

Ultron System Foil system Bonding & Packaging Koos Hartingsveldt Koos Hartingsveldt MEMS-Travee3

Weld Equipment Pick&Place Bonding & Packaging Koos Hartingsveldt Koos Hartingsveldt MEMS-Travee3

-- Deposition Deposition

Aixtron Black Magic Deposition Johan van der Cingel Johan van der Cingel Cl1000

ASM F-120 (ALD) MEMS Deposition Alex van den Bogaard Alex van den Bogaard MEMS-Travee6

ASMI Epsilon 2000 Deposition Alex van den Bogaard Tom Scholtes Cl100-Tunnel5

ASMI Epsilon One Deposition Alex van den Bogaard Tom Scholtes Cl100-Tunnel4

Baltzers Cr/Au Evaporator MEMS Deposition Koos Hartingsveldt Koos Hartingsveldt MEMS-Travee6

CHA Solution Std. Deposition Alex van den Bogaard Wim Wien Cl1000

Liquid Silicon Glove Box Deposition None Alex van den Bogaard Alex van den Bogaard MEMS-Travee2

LPCVD tube E1 TEOS Deposition LPCVD Alex van den Bogaard Silvana Milosavljevic Cl100-Tunnel5

LPCVD tube E2 Nitride Deposition LPCVD Alex van den Bogaard Silvana Milosavljevic Cl100-Tunnel5

LPCVD tube E3 Poly Deposition LPCVD Alex van den Bogaard Silvana Milosavljevic Cl100-Tunnel5

LPCVD tube E4 SiC Deposition LPCVD Alex van den Bogaard Silvana Milosavljevic Cl100-Tunnel5

LPCVD tube F1 Boron Deposition Alex van den Bogaard Alex van den Bogaard Cl1000

LPCVD tube F3 SiC Nitride Deposition Alex van den Bogaard Alex van den Bogaard Cl1000

Meco Mecoplater Copper MEMS Deposition Wim Wien Wim Wien MEMS-Travee4

Novellus Concept 1 Deposition Silvana Milosavljevic Cl100-Tunnel3

Trikon Sigma 204 Dealer Deposition ALLTrikon Johannes van Wingerden Johannes van Wingerden Cl100-Tunnel3

Trikon Sigma 204 Dep A Deposition ALLTrikon Johannes van Wingerden Johannes van Wingerden

Trikon Sigma 204 Dep B Deposition ALLTrikon Johannes van Wingerden Johannes van Wingerden

Trikon Sigma 204 Dep C Deposition ALLTrikon Johannes van Wingerden Johannes van Wingerden

Trikon Sigma 204 HSE Deposition ALLTrikon Johannes van Wingerden Johannes van Wingerden

Varian Implanter E500HP Deposition Tom Scholtes Tom Scholtes

-- Furnaces & Ovens Furnaces & Ovens

Carbolite Ceramic Oven MEMS Furnaces & Ovens Alex van den Bogaard Alex van den Bogaard

Furnace A1 (Diffusion) Furnaces & Ovens DFurnaces Alex van den Bogaard Alex van den Bogaard

Furnace B1 Furnaces & Ovens DFurnaces Alex van den Bogaard Silvana Milosavljevic

Furnace C1 Furnaces & Ovens DFurnaces Alex van den Bogaard Silvana Milosavljevic

Furnace Mems A1 Furnaces & Ovens Alex van den Bogaard Alex van den Bogaard

Furnaces D1 (Wet oxidation CMOS) Furnaces & Ovens DFurnaces Alex van den Bogaard Silvana Milosavljevic

Hereaus Vacuum Oven MEMS Furnaces & Ovens Alex van den Bogaard Alex van den Bogaard

Memmert Oven Furnaces & Ovens Wim Wien Wim Wien

Oven Ultra Clean 100 Furnaces & Ovens Alex van den Bogaard Alex van den Bogaard

Tempress Alloy Furnace C4 Furnaces & Ovens DFurnaces Alex van den Bogaard Silvana Milosavljevic Cl100-Tunnel5

Tempress Diffusion Furnace D2 Furnaces & Ovens DFurnaces Alex van den Bogaard Silvana Milosavljevic Cl100-Tunnel5

-- Lithography Lithography

ASML PAS 5500/80 waferstepper Lithography StdLithography Johannes van Wingerden Johannes van Wingerden

Convac Spinner MEMS Lithography

EVG 101 Spraycoater Lithography Wim Wien Wim Wien

EVG 120 Coater-Developer Lithography StdLithography Wim Wien Wim Wien

EVG 420 Contact Aligner Lithography Wim Wien Wim Wien

Flood Exposure Manual Lithography Wim Wien Wim Wien

Fusion DUV cure Lithography

Hamatech Mask Processor Lithography Other1

Heidelberg DWL200 Lithography Other1

Karl Suss MA6 Contact Aligner MEMS Lithography

Karl Suss MA6/BA6 Contact Aligner MEMS Lithography

Laurell Spinner SAL Lithography

Manual HMDS Lithography

Polos Manual Spinner 1 Cl100 Lithography

Polos Spinner 1 MEMS Lithography

Std Litho: Stepper/CoatDevelop Lithography StdLithography

-- Measurement Measurement

AFM Aura Measurement

AFM Maximus Measurement

AIT 4 point probe Measurement Johan van der Cingel Johan van der Cingel

CDE Resmap 4 pt probe Measurement

Dataphysics Contact Angle System OCA20 Measurement

Dektak 150 MEMS Measurement

Dektak 8 Measurement

Eichorn Wafer Shape Measurement

Hydrofobic Tester/Microscope Measurement

Infrared Setup for Inspection after Bonding Measurement

Leitz MPV-SP Measurement

Leitz MPV-SP MEMS Measurement

Logitech Flatness Measurement System Measurement

Mettler AT20 Weighing Scale Measurement

Microscoop B&P Measurement

Microscope Axiotron Measurement

Microscope Jenatech (Meas Area) MEMS Measurement

Microscope Jenatech (Wet bench) MEMS Measurement

Microscope Jenatech SAL Measurement

Microscope Leitz (Litho) MEMS Measurement

Microscope Leitz Ergolux AMC Measurement

Microscope Leitz Secolux Measurement

Microscope Microline Mask CD Measurement

Microscope Olympus Measurement

Microscope Reichert Measurement

Microscopes General Measurement

Mitutoyo Linear Gauge Counter SAL Measurement

Reflex 300 Particle Measurement Measurement

Sagax Layer Thickness Measurement

SEM Hitachi S7800-H Measurement

SEM JEOL MEMS Measurement

SEM Philips XL50 Measurement

Tencor Alpha-Step SAL Measurement

Tencor Flexus Stress Measurement

Woollam Ellipsometer Measurement

-- Other Other

AML Bonder Other

Freeze/Dry equipment MEMS Other

Lapping/Polishing MEMS Other

Mecapol Polisher MEMS Other

-- Plasma Etching Plasma Etching

Adixen AMS100 Plasma Etching

Alcatel GIR300 F etcher Plasma Etching

Alcatel GIR300 F/Cl etcher MEMS Plasma Etching

Drytek Triode 384T Plasma Etching

Europlasma MEMS Plasma Etching

Europlasma SAL Plasma Etching

LAM Rainbow RIE etcher Plasma Etching

Rapier Omega i2L DRIE etcher Plasma Etching Johan van der Cingel Johan van der Cingel

Tepla Plasma 300 Plasma Etching

Trikon Omega 201 Plasma Etching

-- Wet Cleaning & Etching Wet Cleaning & Etching

05% HF Etching Line Wet Cleaning & Etching Cleaning Silvana Milosavljevic

05% HF Cleaning Line Wet Cleaning & Etching Loek Steenweg Loek Steenweg

05% HF for Al2O3 etch. Etching Line Wet Cleaning & Etching

05% HF for metals SAL Wet Cleaning & Etching

40% HF Etching Line Wet Cleaning & Etching

Acetone Etching Line Wet Cleaning & Etching

Acetone MEMS Wet Cleaning & Etching

Al Etch Etching Line Wet Cleaning & Etching

Al etch MEMS Wet Cleaning & Etching

Anodising bath Etching Line Wet Cleaning & Etching

BHF 1+7 Glass/sodium SAL Wet Cleaning & Etching

BHF 1+7 MEMS Wet Cleaning & Etching

BHF 1+7 Special Metal SAL Wet Cleaning & Etching

BHF1:20 Etching Line Wet Cleaning & Etching

BHF1:7 (Metals) Etching Line Wet Cleaning & Etching

BHF1:7 Etching Line Wet Cleaning & Etching

BHF1:7 Special Etching Line Wet Cleaning & Etching

Cleaning Line All-Class100 Wet Cleaning & Etching Cleaning Silvana Milosavljevic

Etching Line All-Class100 Wet Cleaning & Etching

HF 1% MEMS Wet Cleaning & Etching

HF 40% MEMS Wet Cleaning & Etching

HF Vapor Etcher Primaxx uEtch HF SPTS Wet Cleaning & Etching

HNO3 69% MEMS Wet Cleaning & Etching

HNO3 69% (Si) Cleaning Line Wet Cleaning & Etching Cleaning

HNO3 99% (Metal) Cleaning Line Wet Cleaning & Etching Cleaning

HNO3 99% (Si) Cleaning Line Wet Cleaning & Etching Cleaning

HNO3 99% Au/Cu MEMS Wet Cleaning & Etching

HNO3 99% clean after KOH/TMAOH SAL Wet Cleaning & Etching

HNO3 99% Metal MEMS Wet Cleaning & Etching

HNO3 99% Si MEMS Wet Cleaning & Etching

HNO3 99% Sodium glass SAL Wet Cleaning & Etching

HNO3 99% SOI on glass/metals SAL Wet Cleaning & Etching

Julabo circulator MA-6 Wet Cleaning & Etching None Alex van den Bogaard Alex van den Bogaard

KOH etch bath SAL Wet Cleaning & Etching SiWetEtching

KOH1 etch bath MEMS Wet Cleaning & Etching

KOH2 etch bath (Metal contaminated) SAL Wet Cleaning & Etching

KOH2 etch bath MEMS Wet Cleaning & Etching

Marangoni (Si bonding) Wet Cleaning & Etching

Marangoni Metals Cleaning Line Wet Cleaning & Etching Cleaning

Marangoni Si Cleaning Line Wet Cleaning & Etching Cleaning

Nitride-etch Etching Line Wet Cleaning & Etching

Poly etch MEMS Wet Cleaning & Etching

Poly-Si-Etch Etching Line Wet Cleaning & Etching

PolySi Etch SAL Wet Cleaning & Etching

RCA Cleaning Wet Cleaning & Etching RCACleaning

Rinse&Dryer Etching Line Wet Cleaning & Etching

Rinse&Dryer Metal Cleaning Line Wet Cleaning & Etching Cleaning

Rinse&Dryer Si Cleaning Line Wet Cleaning & Etching Cleaning

Single Wafer Dryer SPIN 150 Wet Cleaning & Etching

SPIN 150 dryer MEMS Wet Cleaning & Etching

SPS Wafer Cleaner after dicing Wet Cleaning & Etching

SPS-Europe Spray Etcher SAL Wet Cleaning & Etching

Standard Cleaning Wet Cleaning & Etching Cleaning

Standard Wet Etching Wet Cleaning & Etching

TMAH etch bath SAL Wet Cleaning & Etching SiWetEtching

Triton X100 Metals Special Etching Line Wet Cleaning & Etching

Triton X100 Si Etching Line Wet Cleaning & Etching