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Else Kooi Laboratory
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Products
Custom Wafers (100 mm) with  
Epitaxy Sputtered
Si, Intrinsic, Doped: B, P, As, also SiGe - Al, Al2O3, AlN, Al/Si
Thermal oxidation - Co/Al, Co/Fe
SiO2 - Cr, CrN
LPCVD - Cu
- Si(poly and amorphous), PECVD (amorphous) - Ge
- SiO2 (from TEOS) - Mo, MoN, MoO3
- SiN (low stress and stoichiometric) - Ni/Fe
- SiC - Sb
PECVD - Si(doped)
- SiO2 (from SiH4/O2 or TEOS) also BPSG - Ti, TiN
- Si3N4 - Zr, ZrN
- SiC Bonding & Packaging
Evaporated Sawing only
- Al, Au, Co, Cr, Fe, Ni, Pt, Pd, Ta, Ti Separate Packages
ALD Bonding & Packaging complete
- Al2O3, TiO2 Wet Si Etching
  KOH, TMAOH

For details, prices and orders, please contact : Info EKL

Bare Wafers (100mm)  
Si [100], CZ, N type: SOI:
1- 5 Ohmcm, 525+/-15 mu SiO2 400nm, Si 340 nm
1-10 Ohmcm, 525+/-25 mu  
5-15 Ohmcm, 525+/-50 mu Glass:
  Eagle2000
Si [100], CZ, P type: Sodium Containing
1- 5 Ohmcm, 525+/-15 mu  
1- 10 Ohmcm, 525+/-25 mu Devices
5- 15 Ohmcm, 525+/-55 mu Nanoreactors
   
Si Double Side Polished P type:  
1- 5 Ohmcm,525+/-15 mu  
1-10 Ohmcm,525+/-25 mu  
1-5 Ohmcm,300+/- 5 mu  
iszgro
iszgro