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Today: 2017-06-23
Week number: 25

Cleanroom News
update: 28 February 2017

Next maintenance week
Maintenance week scheduled in week 15 (10-14 Apr. 2017)

2nd maintenance week 2017 scheduled in week 47

Processing News
update: 14 January 2016

Do not process without a run number (obtain one with Gregory)

New Silicon Wafer Forms
You need to give your id number to get wafers

Always label your wafer boxes
(labels are in the lab)

Always have your flowchart with you in the lab, so we can help you.

Novellus: Do not forget to switch on the TEOS gases!!

update:28 February 2017

User meeting data
Next Meeting
Thursday March 23

Future Meetings
March 23
April 20
May 25
June 22

See past Clean Room News and Presentations here (you need to be logged in)

Send your photo's for the photocontest here

Equipment News
update:22 March 2017

Epsilons: Upgrade harddisks to SSD's - 1 day in week 11 (13-17 March).
Fusion: Maintenance planned in week 14 (max. 3 days).
ASML stepper:  Preventive maintenance planned for week 20 (max. 1 week).
EVG120:  Maintenance planned in week 20 (2 days).
Implanter:  Maintenance planned in week 20 (1 week).
EVG120:  Yearly maintenance planned in week 46 (max. 3 days).



Ethics and Discipline
update: 17 June 2015

Clean up after you are done.
Especially after using the spinners in the MEMSlab

Never pour solvents down the drain!
1. It can dissolve the drain
2. It could be dangerous if someone before or after you pours other chemicals down the drain: explosions!
3. All of the diluted acids that are poured down the drain are collected in a big neutralisation tank. If solvent comes in there, this can damage the pH sensors, which are very expensive.

In case of chemical contamination
If you need immediate help: press the yellow button! (It's there especially for this purpose!)
Otherwise your first contact is the facility people. See the safety note in the lab near the wet benches


update: 28 February 2017

Safety Course Schedule

March 8
April 5
May 10
June 7
July 5
August 9
September 6
October 11
November 8
December 6

enroll here.

Process/Module training
(first do the Safety Course)
on demand, enroll here