update: 20 november 2016
Next maintenance week
week 43: 21-30 October, 2016
All Cleanroom closure due to Rewiring of powercables in the whole EKL building
November 3 7:00-12:00hrs
November 10 7:00-12:00 hrs
November 17 7:00-12:00 hrs
Office and All Cleanroom closure (shutdown your pc):
November 25 13:00 hr till November 28
update: 14 January 2016
Do not process without a run number (obtain one with Gregory)
New Silicon Wafer Forms
You need to give your id number to get wafers
Always label your wafer boxes
(labels are in the lab)
Always have your flowchart with you in the lab, so we can help you.
Novellus: Do not forget to switch on the TEOS gases!!
update: 1 July 2015
New Manual Polos Spinner
Installed! Ask Litho Team for instructions
Use of the measurement room
Contact: Lukasz Pakula
Sigma sputter coater:
There is a carrier for single chips
update: 17 June 2015
Clean up after you are done. Especially after using the spinners in the MEMSlab
Never pour solvents down the drain!
1. It can dissolve the drain
2. It could be dangerous if someone before or after you pours other chemicals down the drain: explosions!
3. All of the diluted acids that are poured down the drain are collected in a big neutralisation tank. If solvent comes in there, this can damage the pH sensors, which are very expensive.
In case of chemical contamination
If you need immediate help: press the yellow button! (It's there especially for this purpose!)
Otherwise your first contact is the facility people. See the safety note in the lab near the wet benches.